发明授权
US06302957B1 Quartz crucible reproducing method 有权
石英坩埚再生法

  • 专利标题: Quartz crucible reproducing method
  • 专利标题(中): 石英坩埚再生法
  • 申请号: US09670715
    申请日: 2000-09-28
  • 公开(公告)号: US06302957B1
    公开(公告)日: 2001-10-16
  • 发明人: Makoto ItoHiroki Murakami
  • 申请人: Makoto ItoHiroki Murakami
  • 优先权: JP11-284341 19991005; JP12-199448 20000630
  • 主分类号: C30B1500
  • IPC分类号: C30B1500
Quartz crucible reproducing method
摘要:
An inner surface of a quartz crucible after being used is cleaned by an acid liquid, and an extraneous material adhered to its inner surface is removed. The inner surface after the extraneous material has been removed is heat treated at 1600° C. or more, and the inner surface where cristobalite formation occurs is recovered into an amorphous state. In this manner, the quartz crucible after being used for growing single crystal silicon is reproduced to a level equal to a new crucible.
信息查询
0/0