发明授权
- 专利标题: Pattern forming material and pattern forming method
- 专利标题(中): 图案形成材料和图案形成方法
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申请号: US09551656申请日: 2000-04-18
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公开(公告)号: US06306556B1公开(公告)日: 2001-10-23
- 发明人: Takahiro Matsuo , Masayuki Endo , Masamitsu Shirai , Masahiro Tsunooka
- 申请人: Takahiro Matsuo , Masayuki Endo , Masamitsu Shirai , Masahiro Tsunooka
- 优先权: JP8-038100 19960226
- 主分类号: G03C1725
- IPC分类号: G03C1725
摘要:
A pattern forming material includes a binary copolymer represented by the following general formula or a ternary or higher copolymer obtained by further polymerizing the binary copolymer with another group: wherein R1 indicates a hydrogen atom or an alkyl group; R2 and R3 independently indicate a hydrogen atom, an alkyl group, a phenyl group or an alkenyl group or together indicate a cyclic alkyl group, a cyclic alkenyl group, a cyclic alkyl group having a phenyl group or a cyclic alkenyl group having a phenyl group; R4 indicates a hydrogen atom or an alkyl group; x satisfies a relationship of 0
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