发明授权
- 专利标题: Thin-film magnetic head and production method thereof
- 专利标题(中): 薄膜磁头及其制造方法
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申请号: US09237547申请日: 1999-01-26
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公开(公告)号: US06307722B1公开(公告)日: 2001-10-23
- 发明人: Kiyoshi Sato , Yoshihiko Kakihara , Masamichi Saito , Toshihiro Kuriyama , Toshinori Watanabe
- 申请人: Kiyoshi Sato , Yoshihiko Kakihara , Masamichi Saito , Toshihiro Kuriyama , Toshinori Watanabe
- 优先权: JP7-83167 19950315; JP7-228095 19950905
- 主分类号: G11B5127
- IPC分类号: G11B5127
摘要:
A longitudinal bias layer and an electrode layer are formed on a non-magnetic material layer. The longitudinal bias layer and the electrode layer are partially removed by an etching technique so that a narrow gap defining the track width Tw is formed in the longitudinal bias layer and the electrode layer. Furthermore, a three-layer film consisting of, from bottom to top, a magnetoresistance effect layer, a non-magnetic layer, and a transverse bias layer, or otherwise a spin valve film consisting of a free magnetic layer, a non-magnetic layer, a fixed magnetic layer and a bias layer is formed on the above structure. The three-layer film or the spin valve film is then partially removed by an etching technique so that the three-layer film or the spin valve film remains only in the above-described narrow gap formed in the longitudinal bias layer and the electrode layer. The shape of the side walls of the three-layer film or the spin valve film is precisely determined by the side walls of the longitudinal bias layer and the electrode layer. The resultant three-layer film or the spin valve film exhibits excellent magnetic detection characteristics. Furthermore, the longitudinal bias layer has good magnetic coupling with the magnetoresistance effect layer.
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