发明授权
US06313045B1 Nanoporous silicone resins having low dielectric constants and method for preparation
有权
具有低介电常数的纳米多孔硅树脂及其制备方法
- 专利标题: Nanoporous silicone resins having low dielectric constants and method for preparation
- 专利标题(中): 具有低介电常数的纳米多孔硅树脂及其制备方法
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申请号: US09459331申请日: 1999-12-13
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公开(公告)号: US06313045B1公开(公告)日: 2001-11-06
- 发明人: Bianxiao Zhong , Russell Keith King , Kyuha Chung , Shizhong Zhang
- 申请人: Bianxiao Zhong , Russell Keith King , Kyuha Chung , Shizhong Zhang
- 主分类号: H01L2131
- IPC分类号: H01L2131
摘要:
Nanoporous silicone resins and silicone resin films having low dielectric constants and a method for preparing such nanoporous silicone resins. The silicone resin comprises the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR1)4, where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of an organosilane described by formula R4SiX3, where R4 is selected from the group consisting of alkyl groups comprising 1 to about 6 carbon atoms and phenyl and each X is an independently selected hydrolyzable substituent, (C) 15 to 70 mol % of an organotrialkoxysilane described by formula R2Si(OR3)3, where R2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R3 is an independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of (D) water, (E) hydrolysis catalyst, and (F) organic solvent for the reaction product. The silicone resin is cured and heated in preferably an inert atmosphere at a temperature sufficient to effect thermolysis of carbon-carbon bonds of the R2 groups thereby forming a nanoporous silicone resin.
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