发明授权
US06313435B1 Mask orbiting for laser ablated feature formation 失效
面罩旋转激光烧蚀特征形成

Mask orbiting for laser ablated feature formation
摘要:
A Method and Apparatus for ablating features from a substrate, such as drilling holes in a polymer substrate for an ink jet printhead, by illuminating the substrate that has passed through a mask that is continuously orbited or moved in a two dimensional pattern. The mask is capable of following a trajectory perpendicular to the angle of the radiation.
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