发明授权
- 专利标题: Mask orbiting for laser ablated feature formation
- 专利标题(中): 面罩旋转激光烧蚀特征形成
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申请号: US09196962申请日: 1998-11-20
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公开(公告)号: US06313435B1公开(公告)日: 2001-11-06
- 发明人: Curtis L. Shoemaker , Luis A. Aguirre
- 申请人: Curtis L. Shoemaker , Luis A. Aguirre
- 主分类号: B23K2638
- IPC分类号: B23K2638
摘要:
A Method and Apparatus for ablating features from a substrate, such as drilling holes in a polymer substrate for an ink jet printhead, by illuminating the substrate that has passed through a mask that is continuously orbited or moved in a two dimensional pattern. The mask is capable of following a trajectory perpendicular to the angle of the radiation.
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