发明授权
- 专利标题: Carrier and system for testing bumped semiconductor components
- 专利标题(中): 用于测试碰撞半导体元件的载体和系统
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申请号: US09322724申请日: 1999-05-28
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公开(公告)号: US06313651B1公开(公告)日: 2001-11-06
- 发明人: David R. Hembree , Warren M. Farnworth , Alan G. Wood , Derek Gochnour , Salman Akram
- 申请人: David R. Hembree , Warren M. Farnworth , Alan G. Wood , Derek Gochnour , Salman Akram
- 主分类号: G01R3102
- IPC分类号: G01R3102
摘要:
A semiconductor carrier and system for testing bumped semiconductor components, such as dice and packages, having contact bumps are provided. The carrier includes a base, an interconnect, and a force applying mechanism. The interconnect includes patterns of contact members adapted to electrically contact the contact bumps. The interconnect can include a substrate having contact members formed as recesses, or as projections, covered with conductive layers. Alternately, the interconnect can be a multi layered tape bonded directly to a base of the carrier. In addition to providing electrical connections, the contact members perform an alignment function by self centering the contact bumps within the contact members. The carrier can also include an alignment member configured to align the components with the interconnect. The system can include the carrier, a socket, and a testing apparatus such as a burn-in board in electrical communication with test circuitry.
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