发明授权
US06326125B1 Photosensitive composition and calcined pattern obtained by use thereof
有权
通过使用它们获得的感光组合物和煅烧图案
- 专利标题: Photosensitive composition and calcined pattern obtained by use thereof
- 专利标题(中): 通过使用它们获得的感光组合物和煅烧图案
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申请号: US09257043申请日: 1999-02-25
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公开(公告)号: US06326125B1公开(公告)日: 2001-12-04
- 发明人: Masahisa Kakinuma , Nobuyuki Suzuki , Tsuyoshi Mitani
- 申请人: Masahisa Kakinuma , Nobuyuki Suzuki , Tsuyoshi Mitani
- 优先权: JP10-063901 19980302
- 主分类号: G03F7033
- IPC分类号: G03F7033
摘要:
Disclosed are a photosensitive composition which is developable with an aqueous alkaline solution and such calcined patterns as a conductor pattern, a vitreous dielectric pattern, and a fluorescent pattern which are obtained by the use of the photosensitive composition. The photosensitive composition comprises (A) a carboxyl group-containing polymer obtained by the reaction of (a) a hydroxyl group-containing polymer with (b) a polybasic acid anhydride and/or (F) a carboxyl group-containing photosensitive polymer obtained by causing the carboxyl group-containing polymer (A) mentioned above to react further with a compound containing a glycidyl group and an unsaturated double bond, (B) a diluent, (C) a photopolymerization initiator, and (D) an inorganic powder. The composition may be in the form of paste or in the form of a dry film. When the photosensitive composition is in the form of paste, the paste is applied to a substrate and then dried to form a film. When the photosensitive composition is in the form of a dry film, the film is laminated on the substrate. A calcined pattern of high fineness is obtained by patterning the superposed layer of the composition by selective exposure to light and development, and thereafter calcining the patterned film.
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