发明授权
- 专利标题： Infrared radiation detector and method of manufacturing the same
- 专利标题（中）： 红外辐射探测器及其制造方法
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申请号： US09323730申请日： 1999-06-01
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公开(公告)号： US06326621B1公开(公告)日： 2001-12-04
- 发明人: Takeshi Kamada , Ryoichi Takayama , Satoru Fujii , Atsushi Tomozawa , Isaku Kanno
- 申请人： Takeshi Kamada , Ryoichi Takayama , Satoru Fujii , Atsushi Tomozawa , Isaku Kanno
- 优先权： JP10-153152 19980602
- 主分类号： G01J502
- IPC分类号： G01J502
摘要：
The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate.
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