发明授权
- 专利标题: Interferometer and method for measuring the refractive index and optical path length effects of air
- 专利标题(中): 干涉仪和测量空气的折射率和光路长度影响的方法
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申请号: US09252266申请日: 1999-02-18
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公开(公告)号: US06327039B1公开(公告)日: 2001-12-04
- 发明人: Peter de Groot , Henry A. Hill , Frank C. Demarest
- 申请人: Peter de Groot , Henry A. Hill , Frank C. Demarest
- 主分类号: G01B902
- IPC分类号: G01B902
摘要:
Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing. More specifically, the invention employs electronic frequency processing to provide measurements of dispersion of the refractive index, the dispersion being substantially proportional to the density of the gas, and/or measurements of dispersion of the optical path length, the dispersion of the optical path length being related to the dispersion of the refractive index and the physical length of the measurement path. The refractive index of the gas and/or the optical path length effects of the gas are subsequently computed from the measured dispersion of the refractive index and/or the measured dispersion of the optical path length, respectively. The information generated by the inventive apparatus is particularly suitable for use in interferometric distance measuring instruments (DMI) to compensate for errors related to refractive index of gas in a measurement path brought about by environmental effects and turbulence induced by rapid stage slew rates.
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