发明授权
- 专利标题: Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
- 专利标题(中): 执行器包括交替启动和相对段的蛇形排列和相关方法
-
申请号: US09498100申请日: 2000-02-04
-
公开(公告)号: US06327855B1公开(公告)日: 2001-12-11
- 发明人: Edward A. Hill , Vijayakumar Rudrappa Dhuler
- 申请人: Edward A. Hill , Vijayakumar Rudrappa Dhuler
- 主分类号: F01B2910
- IPC分类号: F01B2910
摘要:
A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.
信息查询