发明授权
US06327855B1 Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods 失效
执行器包括交替启动和相对段的蛇形排列和相关方法

  • 专利标题: Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
  • 专利标题(中): 执行器包括交替启动和相对段的蛇形排列和相关方法
  • 申请号: US09498100
    申请日: 2000-02-04
  • 公开(公告)号: US06327855B1
    公开(公告)日: 2001-12-11
  • 发明人: Edward A. HillVijayakumar Rudrappa Dhuler
  • 申请人: Edward A. HillVijayakumar Rudrappa Dhuler
  • 主分类号: F01B2910
  • IPC分类号: F01B2910
Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
摘要:
A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.
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