发明授权
US06329700B1 Semiconductor wafer and semiconductor device 有权
半导体晶圆和半导体器件

Semiconductor wafer and semiconductor device
摘要:
A semiconductor wafer and a semiconductor device with more chips are obtained. The semiconductor wafer includes a plurality of dicing lines (DXa, DXb, DYa, DYb) extending in the lateral direction (X) and in the longitudinal direction (Y) with an interval (L1) therebetween, and a semiconductor element forming region (CR1) with a semiconductor element, sectioned by the dicing lines (DXa, DXb, DYa, DYb). The dicing lines both in the lateral direction (X) and in the longitudinal direction (Y) have alternate widths (La, Lb), one of which (Lb) is larger than the other (La).
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