发明授权
- 专利标题: Method for manufacturing TFT LCD device
- 专利标题(中): TFT液晶显示装置的制造方法
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申请号: US09740497申请日: 2000-12-19
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公开(公告)号: US06335148B2公开(公告)日: 2002-01-01
- 发明人: Seok Lyul Lee , Jung Mok Jun , Seung Min Lee
- 申请人: Seok Lyul Lee , Jung Mok Jun , Seung Min Lee
- 优先权: KR99-64383 19991229
- 主分类号: G03F700
- IPC分类号: G03F700
摘要:
Disclosed is a method for manufacturing a thin film transistor LCD device, in which a counter and a gate bus line are made in a single photolithography process, and a channel of a thin film transistor, a source electrode, a drain electrode, ohmic contacts for the source and drain electrodes are made in a single photolithography process. The method involves the steps of forming a first photoresist layer on said deposited metal layer for the gate bus line; exposing said first photoresist layer to a scanning light, so that the portion of the first photoresist layer disposed over a counter electrode region for forming said counter electrode may be partially lightened; patterning said first photoresist layer so that an area of the metal layer for the gate bus line lying under the partially lightened portion of the first photoresist layer may not be exposed; patterning said metal layer for the gate bus line by using said patterned first photoresist layer as a barrier layer so that said counter electrode region and a gate bus line region may be defined; patterning said transparent conductive layer for the counter electrode by using said patterned metal layer as a barrier layer so that said counter electrode may be formed; patterning said metal layer for the gate bus line by using said patterned first photoresist layer as a barrier layer so that said gate bus line may be formed.
公开/授权文献
- US20010006765A1 Method for manufacturing TFT LCD device 公开/授权日:2001-07-05
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