发明授权
- 专利标题: Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
- 专利标题(中): 使用应力敏感膜的压电可调共振频率束
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申请号: US09405924申请日: 1999-09-24
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公开(公告)号: US06336366B1公开(公告)日: 2002-01-08
- 发明人: Thomas G. Thundat , Eric A. Wachter
- 申请人: Thomas G. Thundat , Eric A. Wachter
- 主分类号: G01P1509
- IPC分类号: G01P1509
摘要:
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.
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