发明授权
US06337365B1 Electronic/electric components used in clean room and substrate treatment apparatus
失效
用于洁净室和基板处理设备的电子/电气部件
- 专利标题: Electronic/electric components used in clean room and substrate treatment apparatus
- 专利标题(中): 用于洁净室和基板处理设备的电子/电气部件
-
申请号: US09381667申请日: 1999-09-24
-
公开(公告)号: US06337365B1公开(公告)日: 2002-01-08
- 发明人: Takenobu Matsuo , Tsuyoshi Wakabayashi , Misako Saito , Sadao Kobayashi , Yoshihide Wakayama , Masayuki Imafuku
- 申请人: Takenobu Matsuo , Tsuyoshi Wakabayashi , Misako Saito , Sadao Kobayashi , Yoshihide Wakayama , Masayuki Imafuku
- 优先权: JP9-071201 19970325
- 主分类号: C08L9106
- IPC分类号: C08L9106
摘要:
An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.
信息查询