发明授权
US06337365B1 Electronic/electric components used in clean room and substrate treatment apparatus 失效
用于洁净室和基板处理设备的电子/电气部件

Electronic/electric components used in clean room and substrate treatment apparatus
摘要:
An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.
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