发明授权
- 专利标题: Energy beam processing method and processing apparatus therefor
- 专利标题(中): 能量束处理方法及其处理装置
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申请号: US09252201申请日: 1999-02-18
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公开(公告)号: US06346687B1公开(公告)日: 2002-02-12
- 发明人: Makoto Kinoshita , Takeshi Kobayashi
- 申请人: Makoto Kinoshita , Takeshi Kobayashi
- 优先权: JP10-056155 19980219; JP10-325582 19981116; JP11-034871 19990212
- 主分类号: B23K2600
- IPC分类号: B23K2600
摘要:
An energy beam method and apparatus for processing a workpiece is accomplished by making the energy density per unit time and unit area of the energy beam proportional to the traveling velocity of the workpiece. This is accomplished by adjusting the frequency, irradiation power, or duty cycle of the energy beam. The travel velocity of the workpiece is measured by using a linear scale to generate pulse signals, calculating a traveling velocity based on the pulse signals and generating a pulse signal, dividing the pulse signals output by the calculation step, and generating a trigger signal in response to the pulse signals created by the dividing step to drive an energy beam irradiation device (such as a laser generator) to output the energy beam.