发明授权
- 专利标题: Heat sink and method of manufacturing heat sink
- 专利标题(中): 散热片和制造散热片的方法
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申请号: US09286420申请日: 1999-04-06
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公开(公告)号: US06355505B1公开(公告)日: 2002-03-12
- 发明人: Hiroshi Maeda , Mamoru Fujisawa , Yoshikazu Hanada
- 申请人: Hiroshi Maeda , Mamoru Fujisawa , Yoshikazu Hanada
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
Heat sinks for semiconductor laser devices are manufactured by processing a surface of a panel into a mirror surface, forming a plurality of substantially parallel photomasks spaced at predetermined intervals on the mirror surface, etching the mirror surface through the photomasks to define grooves, the grooves and the mirror surface jointly providing edges therebetween, removing the photomasks from the panel, and thereafter, cutting the panel along the grooves into a plurality of heat sinks. Each of the heat sinks has a surface having a desired ultrahigh level of surface finish accuracy up its edge, and can be manufactured relatively inexpensively.
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