发明授权
- 专利标题: Precision cutting apparatus and cutting method using the same
- 专利标题(中): 精密切割装置及切割方法采用相同方式
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申请号: US09515510申请日: 2000-02-29
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公开(公告)号: US06361404B1公开(公告)日: 2002-03-26
- 发明人: Souichi Ishiwata , Kazuma Sekiya , Takayuki Umahashi
- 申请人: Souichi Ishiwata , Kazuma Sekiya , Takayuki Umahashi
- 优先权: JP9-176935 19970702; JP9-232183 19970828
- 主分类号: B24B100
- IPC分类号: B24B100
摘要:
Disclosed is an improved precision cutting apparatus comprising a chuck table for holding a workpiece, and first and second cutting means each including a spindle unit having a blade attached thereto. The first and second cutting means are series-arranged with their blades opposing a predetermined distance apart, thereby cutting along two traces at one time by moving the chuck table relative to the stationary cutting means. These cutting means need not be allowed to overrun the workpiece while cutting, thus saving extra time required for overrunning which otherwise, would be required as is the case with the parallel-arrangement of two cutting means, and accordingly the dicing can be performed at an increased efficiency.
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