发明授权
US06361599B1 Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
有权
将液体分配到集成电路晶片上的机制,具有最小化的反溅射
- 专利标题: Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
- 专利标题(中): 将液体分配到集成电路晶片上的机制,具有最小化的反溅射
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申请号: US09781821申请日: 2001-02-12
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公开(公告)号: US06361599B1公开(公告)日: 2002-03-26
- 发明人: Vincent L. Marinaro , Eric R. Kent
- 申请人: Vincent L. Marinaro , Eric R. Kent
- 主分类号: B05C502
- IPC分类号: B05C502
摘要:
A mechanism for effectively dispensing liquid onto a surface of an IC (Integrated Circuit) wafer with minimized back-splash. A nozzle includes a liquid chamber that fills up with the liquid to be dispensed onto the surface of the IC wafer, and the nozzle includes a plurality of nozzle passages. A nozzle passage carries and directs the liquid from the liquid chamber toward the surface of the IC wafer to provide a respective liquid stream from a respective location on the nozzle to a respective spot on the surface of the IC wafer as the IC wafer is spinning. A nozzle passage is disposed within the nozzle at a respective angle with respect to the surface of the IC wafer such that the respective liquid stream from the nozzle passage is directed toward a velocity vector at the respective spot on the surface of the IC wafer where the respective liquid stream hits the surface of the IC wafer. For example, the respective angle of the nozzle passage with respect to the surface of the IC wafer may be 45°. The angling of the liquid stream toward the velocity vector on the IC wafer as the IC wafer spins reduces back-splash when the liquid stream hits the IC wafer. In addition, the liquid stream may be applied onto the surface of the IC wafer with relatively low pressure. Thus, the nozzle of the present invention dispenses liquid onto the surface of the IC wafer with minimized back-splash to reduce bubble defects within the integrated circuit fabricated on the surface of the IC wafer.
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