Invention Grant
US06362499B1 Ferroelectric transistors using thin film semiconductor gate electrodes 有权
使用薄膜半导体栅电极的铁电晶体管

Ferroelectric transistors using thin film semiconductor gate electrodes
Abstract:
A ferroelectric structure on an integrated circuit and methods of making and using the same are disclosed, which may be used, for instance, in a high-speed, non-volatile, non-destructive readout random-access memory device. Generally, the ferroelectric structure combines a thin film ferroelectric variable resistor and a substrate (e.g. silicon) transistor, using a semiconducting film which is common to both. A field effect transistor 26 integrated into substrate 30 has a gate oxide 36 and a semiconducting gate electrode 38 with electrical connections at a first end 44 and a second end 46. Overlying gate electrode 38 is a ferroelectric thin film 40 and a conductive electrode 42. The polarization of ferroelectric thin film 40 is set by applying an appropriate voltage between gate electrode 38 and conductive electrode 42. The polarization of ferroelectric thin film 40 may be subsequently determined by applying a read voltage to 42 and 44, thus causing a voltage V2 to appear at 46 which is determined by the polarization of the ferroelectric variable resistor formed by 38 and 40. Since 38 also forms the gate electrode for field effect transistor 26, the magnitude of V2 affects the magnitude of current I2. Thus I2 is effectively an amplified signal related to the ferroelectric variable resistance which may be read without perturbing the polarization of ferroelectric thin film 40.
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