发明授权
- 专利标题: Manufacturing device and method of the exposure device
- 专利标题(中): 曝光装置的制造装置和方法
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申请号: US09580876申请日: 2000-05-30
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公开(公告)号: US06379482B1公开(公告)日: 2002-04-30
- 发明人: Hirofumi Nakayasu , Youji Houki , Yoshihiko Taira , Tsutomu Nagatomi
- 申请人: Hirofumi Nakayasu , Youji Houki , Yoshihiko Taira , Tsutomu Nagatomi
- 优先权: JP11-300663 19991022
- 主分类号: B32B3100
- IPC分类号: B32B3100
摘要:
It is an exemplified object of the present invention to provide a manufacturing device and method that can manufacture a high-performance exposure device in a short time. To achieve this object, the manufacturing method of the exposure device is configured to have its part detachable from its main body. This may allow, for instance, a holding member that holds the exposure device after a bonding step of the exposure device is finished while an adhesive is being cured, to be detached from the manufacturing device and to attach another holding member to the manufacturing device to continue the manufacturing process up to a bonding step, thereby reducing or eliminating a downtime of the device.
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