发明授权
- 专利标题: Plating apparatus
- 专利标题(中): 电镀装置
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申请号: US09601084申请日: 2000-07-27
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公开(公告)号: US06379520B1公开(公告)日: 2002-04-30
- 发明人: Fumio Kuriyama , Hiroyuki Ueyama , Junitsu Yamakawa , Kenichi Suzuki , Atsushi Chono
- 申请人: Fumio Kuriyama , Hiroyuki Ueyama , Junitsu Yamakawa , Kenichi Suzuki , Atsushi Chono
- 优先权: JP10-340576 19981130; JP10-342611 19981202
- 主分类号: C25D2112
- IPC分类号: C25D2112
摘要:
The plating apparatus has a plating section in which a plating process is performed and a control section for regulating the plating solution. The plating section includes a plating bath containing plating solution, an anode provided in the plating solution, and a plating object serving as a cathode placed in the plating solution opposite the anode. The control section includes a regulating tank for regulating the composition and/or concentration of the plating solution, and a replenishing tank for injecting solution into the plating solution in the regulating tank. The plating apparatus also includes a mechanism for circulating plating solution between the regulating tank in the control section and the plating bath in the plating section. The plating section is installed in a first room, while the control section is installed in a second room, which is separate from the first room Accordingly, contamination in the plating section is prevented.
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