发明授权
US06379521B1 Method of producing zinc oxide film, method of producing photovoltaic element, and method of producing semiconductor element substrate 有权
氧化锌膜的制造方法,光电元件的制造方法以及半导体元件基板的制造方法

  • 专利标题: Method of producing zinc oxide film, method of producing photovoltaic element, and method of producing semiconductor element substrate
  • 专利标题(中): 氧化锌膜的制造方法,光电元件的制造方法以及半导体元件基板的制造方法
  • 申请号: US09222848
    申请日: 1998-12-30
  • 公开(公告)号: US06379521B1
    公开(公告)日: 2002-04-30
  • 发明人: Yutaka Nishio
  • 申请人: Yutaka Nishio
  • 优先权: JP10-000750 19980106
  • 主分类号: C25D2106
  • IPC分类号: C25D2106
Method of producing zinc oxide film, method of producing photovoltaic element, and method of producing semiconductor element substrate
摘要:
The present invention provides a method of producing a zinc oxide film, which comprises applying current between a conductive base member immersed in an electrodepositing bath and a counter electrode immersed in the electrodepositing bath to form a zinc oxide film on the conductive base member, wherein the electrodepositing bath is maintained at a temperature of 50° C. or more and has a temperature profile such that the temperature of the electrodepositing bath is lower in the final stage of electrodeposition than in the initial of electrodeposition. By the present method, a zinc oxide film with the excellent effect of light containment is stably produced in a short time, thereby producing a solar cell with a high efficiency at low a cost.
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