Invention Grant
US06380079B1 Metal wiring in semiconductor device and method for fabricating the same 有权
半导体器件中的金属布线及其制造方法

  • Patent Title: Metal wiring in semiconductor device and method for fabricating the same
  • Patent Title (中): 半导体器件中的金属布线及其制造方法
  • Application No.: US09709624
    Application Date: 2000-11-13
  • Publication No.: US06380079B1
    Publication Date: 2002-04-30
  • Inventor: Jung Won Lee
  • Applicant: Jung Won Lee
  • Priority: KR99-63981 19991228
  • Main IPC: H01L2144
  • IPC: H01L2144
Metal wiring in semiconductor device and method for fabricating the same
Abstract:
Metal wiring in a semiconductor device and method for fabricating the same, the metal wiring including a first interlayer insulating film having a first contact hole to a region of a semiconductor substrate, a barrier metal film on an inside surface of the first contact hole, a second interlayer insulating film having a second contact hole to the barrier metal film formed on the first interlayer insulating film, a contact plug in the first and second contact holes in contact with the barrier metal film, and a metal wiring formed on the second interlayer insulating film in contact with the contact plug, whereby permitting to form a barrier metal film under a contact hole regardless of an aspect ratio and an area of the contact hole.
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