Invention Grant
- Patent Title: Metal wiring in semiconductor device and method for fabricating the same
- Patent Title (中): 半导体器件中的金属布线及其制造方法
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Application No.: US09709624Application Date: 2000-11-13
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Publication No.: US06380079B1Publication Date: 2002-04-30
- Inventor: Jung Won Lee
- Applicant: Jung Won Lee
- Priority: KR99-63981 19991228
- Main IPC: H01L2144
- IPC: H01L2144

Abstract:
Metal wiring in a semiconductor device and method for fabricating the same, the metal wiring including a first interlayer insulating film having a first contact hole to a region of a semiconductor substrate, a barrier metal film on an inside surface of the first contact hole, a second interlayer insulating film having a second contact hole to the barrier metal film formed on the first interlayer insulating film, a contact plug in the first and second contact holes in contact with the barrier metal film, and a metal wiring formed on the second interlayer insulating film in contact with the contact plug, whereby permitting to form a barrier metal film under a contact hole regardless of an aspect ratio and an area of the contact hole.
Information query