发明授权
US06383239B1 Free abrasive slurry composition and a grinding method using the same
失效
自由研磨浆料组合物和使用其的研磨方法
- 专利标题： Free abrasive slurry composition and a grinding method using the same
- 专利标题（中）： 自由研磨浆料组合物和使用其的研磨方法
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申请号： US09522115申请日： 2000-03-09
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公开(公告)号： US06383239B1公开(公告)日： 2002-05-07
- 发明人: Yasuyuki Suzuki , Tomohiro Kaku , Isao Saito , Kazuya Orii , Yasutoshi Fujita , Masao Yamaguchi , Masahiro Sasaki
- 申请人： Yasuyuki Suzuki , Tomohiro Kaku , Isao Saito , Kazuya Orii , Yasutoshi Fujita , Masao Yamaguchi , Masahiro Sasaki
- 优先权： JP11-068281 19990315; JP11-206120 19990721
- 主分类号： C09K314
- IPC分类号： C09K314
摘要：
The present invention relates to a free abrasive slurry composition which is advantageously used in uniform grinding of a composite material composed of a plurality of materials each having different hardness, without causing selective grinding. The free abrasive slurry composition contains abrasive particles, an anti-abrasion agent as an anti-selective grinding agent and a dispersion medium and the anti-abrasive agent is a compound containing one or both of sulfur and phosphorus or hydroxyl group(s) in the molecular chain.