发明授权
US06383898B1 Method for manufacturing photoelectric conversion device 有权
制造光电转换装置的方法

  • 专利标题: Method for manufacturing photoelectric conversion device
  • 专利标题(中): 制造光电转换装置的方法
  • 申请号: US09577879
    申请日: 2000-05-25
  • 公开(公告)号: US06383898B1
    公开(公告)日: 2002-05-07
  • 发明人: Katsushi Kishimoto
  • 申请人: Katsushi Kishimoto
  • 优先权: JP11-150270 19990528; JP11-374085 19991228
  • 主分类号: H01L2120
  • IPC分类号: H01L2120
Method for manufacturing photoelectric conversion device
摘要:
A photoelectric conversion device including a plurality of pin junction layers, wherein at least a p-layer adjacent to an n-layer is formed of a stack of an amorphous silicon layer as a first p-layer and an amorphous silicon layer as a second p-layer, the first p-layer having a thickness of 5 nm or less and containing a p-type impurity and an n-type impurity, and the second p-layer having a p-type impurity concentration gradually decreasing as it is closer to an i-layer.
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