发明授权
- 专利标题: Planar hetero-interface photodetector
- 专利标题(中): 平面异质界面光电探测器
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申请号: US09730692申请日: 2000-12-06
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公开(公告)号: US06384462B1公开(公告)日: 2002-05-07
- 发明人: Alexandre Pauchard , Yu-Hwa Lo
- 申请人: Alexandre Pauchard , Yu-Hwa Lo
- 主分类号: H01L31072
- IPC分类号: H01L31072
摘要:
A planar avalanche photodetector (APD) is fabricated by forming a, for example, InGaAs absorption layer on a p+-type semiconductor substrate, such as InP, and wafer-bonding to the absorption layer a second p-type semiconductor, such as Si, to form a multiplication layer. The layer thickness of the multiplication layer is substantially identical to that of the absorption layer. A region in a top surface of the p-type Si multiplication layer is doped n+-type to form a carrier separation region and a high electric field in the multiplication region. The APD can further include a guard-ring to reduce leakage currents as well as a resonant mirror structure to provide to wavelength selectivity. The planar geometry furthermore favors the integration of high-speed electronic circuits on the same substrate to fabricate monolithic optoelectronic transceivers.
公开/授权文献
- US20020063303A1 PLANAR HETERO-INTERFACE PHOTODETECTOR 公开/授权日:2002-05-30
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