A method of manufacturing semiconductors is provided which avoids metal deposition in voids formed in the dielectric between interconnects. In a preferred embodiment, an etch stop recess portion is provided over the dielectric which encloses the interconnects to prevent via openings from extending into the voids during the etching of the via openings. Accordingly, metal deposition of the voids during metal deposition of the vias is avoided. As a result, the semiconductors so formed has reduced capacitance between the interconnects and improved reliability since the voids are cleared of any metal deposition.