发明授权
US06388265B1 Method for distinguishing a specific region in a sample to be observed by a microscope 失效
用于通过显微镜区分要观察的样品中的特定区域的方法

  • 专利标题: Method for distinguishing a specific region in a sample to be observed by a microscope
  • 专利标题(中): 用于通过显微镜区分要观察的样品中的特定区域的方法
  • 申请号: US09430945
    申请日: 1999-11-01
  • 公开(公告)号: US06388265B1
    公开(公告)日: 2002-05-14
  • 发明人: Wen-Tung ChangJui-Yen Huang
  • 申请人: Wen-Tung ChangJui-Yen Huang
  • 优先权: TW87118216 19981102
  • 主分类号: G01N2186
  • IPC分类号: G01N2186
Method for distinguishing a specific region in a sample to be observed by a microscope
摘要:
A method for distinguishing a specific region in a sample to be observed by a microscope is disclosed. The method includes the steps of (a) forming a first concavity on a first side of the specific region by a focus ion beam (FIB) technique, (b) forming a second concavity on a second side of the specific region opposite to the first side by the focus ion beam technique, and (c) filling the first concavity and the second concavity with a first metallic packing and a second metallic packing respectively for defining the specific region to be observed.
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