发明授权
US06388265B1 Method for distinguishing a specific region in a sample to be observed by a microscope
失效
用于通过显微镜区分要观察的样品中的特定区域的方法
- 专利标题: Method for distinguishing a specific region in a sample to be observed by a microscope
- 专利标题(中): 用于通过显微镜区分要观察的样品中的特定区域的方法
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申请号: US09430945申请日: 1999-11-01
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公开(公告)号: US06388265B1公开(公告)日: 2002-05-14
- 发明人: Wen-Tung Chang , Jui-Yen Huang
- 申请人: Wen-Tung Chang , Jui-Yen Huang
- 优先权: TW87118216 19981102
- 主分类号: G01N2186
- IPC分类号: G01N2186
摘要:
A method for distinguishing a specific region in a sample to be observed by a microscope is disclosed. The method includes the steps of (a) forming a first concavity on a first side of the specific region by a focus ion beam (FIB) technique, (b) forming a second concavity on a second side of the specific region opposite to the first side by the focus ion beam technique, and (c) filling the first concavity and the second concavity with a first metallic packing and a second metallic packing respectively for defining the specific region to be observed.
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