发明授权
- 专利标题: Erosion resistant gas energizer
- 专利标题(中): 耐腐蚀气体发生器
-
申请号: US09547423申请日: 2000-04-11
-
公开(公告)号: US06391146B1公开(公告)日: 2002-05-21
- 发明人: Ashish Bhatnagar , Kartik Ramaswamy , Tony S. Kaushal , Kwok Manus Wong , Shamouil Shamouilian
- 申请人: Ashish Bhatnagar , Kartik Ramaswamy , Tony S. Kaushal , Kwok Manus Wong , Shamouil Shamouilian
- 主分类号: H05H100
- IPC分类号: H05H100
摘要:
An apparatus and method for reducing hazardous gases exhausted from a process chamber 25 includes an effluent gas treatment system 200 with a gas energizing reactor 210 with an erosion resistant inner surface 280. Optionally, an additive gas source 230 may be provided to introduce additive gas into the gas energizing reactor 210. In one embodiment, the inner surface comprises a fluorine-containing compound. In another embodiment, the inner surface comprises an oxide and a stabilizing agent.