- 专利标题: Method and apparatus for testing semiconductor devices
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申请号: US09350925申请日: 1999-07-12
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公开(公告)号: US06392433B1公开(公告)日: 2002-05-21
- 发明人: Kenji Itasaka , Terumi Kamifukumoto , Yuji Akasaki , Nobuo Ooyama
- 申请人: Kenji Itasaka , Terumi Kamifukumoto , Yuji Akasaki , Nobuo Ooyama
- 优先权: JP10-341936 19981201
- 主分类号: G01R3126
- IPC分类号: G01R3126
摘要:
A method of testing semiconductor devices includes an adhering step, a position correcting step, and an electrical test step. The adhering step includes adhering either a semiconductor device collective body or a plurality of individual semiconductor devices onto an adhesive tape provided on a tape-holding member, the semiconductor device collective body being constructed by a plurality of semiconductor devices integrated together. The position correcting step includes positioning the semiconductor devices by mounting the tape-holding member on a position correction unit and, using an image processing technique, implementing position recognition and position correction of the semiconductor devices adhered on the adhesive tape. The electrical test step includes implementing an electrical characteristic test on the semiconductor devices positioned in the position correction step by connected the semiconductor devices on a testing contactor.
公开/授权文献
- US20010043076A1 METHOD AND APPARATUS FOR TESTING SEMICONDUCTOR DEVICES 公开/授权日:2001-11-22
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