发明授权
- 专利标题： Optical waveguide device and method of forming the same
- 专利标题（中）： 光波导器件及其形成方法
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申请号： US09639747申请日： 2000-08-14
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公开(公告)号： US06396988B1公开(公告)日： 2002-05-28
- 发明人: Tsuyoshi Shimoda
- 申请人： Tsuyoshi Shimoda
- 优先权： JP11-229464 19990813; JP11-229465 19990813
- 主分类号： G02B610
- IPC分类号： G02B610
摘要：
The present invention provides an optical waveguide device having a bottom cladding layer, a core and a top cladding layer, wherein a first submerge-preventing silica-based layer is further provided over the bottom cladding layer and under the core, and the first submerge-preventing silica-based layer is doped with at least one dopant and the first submerge-preventing silica-based layer is higher in softening temperature than the top cladding layer.
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