发明授权
- 专利标题: Programmed pulse electroplating process
- 专利标题(中): 程序脉冲电镀工艺
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申请号: US09561883申请日: 2000-05-01
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公开(公告)号: US06402924B1公开(公告)日: 2002-06-11
- 发明人: James L. Martin , Stephane Menard , David N. Michelen
- 申请人: James L. Martin , Stephane Menard , David N. Michelen
- 主分类号: C25D518
- IPC分类号: C25D518
摘要:
The present invention relates to a method of electrodepositing metal onto a substrate, which comprises applying a pulsed periodic reverse current across the electrodes of a plating cell utilizing a peak reverse current density and peak forward current density; and varying the ratio of peak reverse current density to peak forward current density in periodic cycles to provide metal deposits of uniform thickness and appearance upon the substrate. The invention also relates to a process for improving the properties of an electrodeposit, particularly on substrates having uneven surfaces or apertures, by using programmed pulse periodic reverse current modulation. More particularly, it involves varying the anodic to cathodic current density ratio, in order to improve the surface uniformity appearance, grain structure and levelling of the deposit while maintaining high current density throwing power.
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