发明授权
US06409587B1 Dual-hardness polishing pad for linear polisher and method for fabrication
有权
用于线性抛光机的双硬度抛光垫及其制造方法
- 专利标题: Dual-hardness polishing pad for linear polisher and method for fabrication
- 专利标题(中): 用于线性抛光机的双硬度抛光垫及其制造方法
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申请号: US09713827申请日: 2000-11-15
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公开(公告)号: US06409587B1公开(公告)日: 2002-06-25
- 发明人: Tsu Shih , Syun-Ming Jang , Ying-Ho Chen , Wen-Chih Chiou
- 申请人: Tsu Shih , Syun-Ming Jang , Ying-Ho Chen , Wen-Chih Chiou
- 优先权: JP11-326188 19991116
- 主分类号: B24D1100
- IPC分类号: B24D1100
摘要:
A composite, dual-hardness polishing pad for use in a linear chemical mechanical polishing apparatus and a method for forming the pad are described. In the composite, dual-hardness polishing pad, a pad body is first provided which has a leading edge and a trailing edge for mounting to a linear belt immediately adjacent to a second polishing pad. The pad body is fabricated of a material that has a first hardness, the leading edge contacts an object being polished on the composite polishing pad before the trailing edge when the linear belt turns in a linear polishing process. The composite polishing pad further includes a buffer pad that is adhesively joined to the leading edge of the pad body for contacting the object that is being polished, the buffer pad may be fabricated of a material that has a second hardness which is at least 20% smaller than the first hardness such that impact on the object being polished is minimized during a linear polishing process. The present invention is further directed to a method for adhesively joining a buffer pad to a pad body of a polishing pad.
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