发明授权
US06410957B1 Method of forming poly tip to improve erasing and programming speed in split gate flash
有权
形成多头尖端的方法,以提高分流闸闪光灯的擦除和编程速度
- 专利标题: Method of forming poly tip to improve erasing and programming speed in split gate flash
- 专利标题(中): 形成多头尖端的方法,以提高分流闸闪光灯的擦除和编程速度
-
申请号: US09713840申请日: 2000-11-16
-
公开(公告)号: US06410957B1公开(公告)日: 2002-06-25
- 发明人: Chia-Ta Hsieh , Di-Son Kuo , Yai-Fen Lin , Hung-Cheng Sung
- 申请人: Chia-Ta Hsieh , Di-Son Kuo , Yai-Fen Lin , Hung-Cheng Sung
- 主分类号: H01L218247
- IPC分类号: H01L218247
摘要:
A method is disclosed for forming a split gate flash memory cell having a thin floating gate and a sharp poly tip in order to improve the erasing and programming speed of the cell. The method involves the use of an oxide other than the poly oxide that is conventionally employed in forming the floating gate, and also using to advantage a so-called “smiling effect” which is normally taught away. The smiling effect, or an uneven thickening of an oxide layer, comes into play while growing interpoly oxide where concurrently the oxidation of the polysilicon gate advances in such a manner so as to form a sharp and reliable poly tip. The invention is also directed to providing a split gate flash memory cell having a thin floating gate and a poly tip therein.