发明授权
US06414357B1 Master-slice type semiconductor IC device with different kinds of basic cells
失效
具有不同种类的基本单元的主片式半导体IC器件
- 专利标题: Master-slice type semiconductor IC device with different kinds of basic cells
- 专利标题(中): 具有不同种类的基本单元的主片式半导体IC器件
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申请号: US09655940申请日: 2000-09-06
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公开(公告)号: US06414357B1公开(公告)日: 2002-07-02
- 发明人: Kouichi Kumagai
- 申请人: Kouichi Kumagai
- 主分类号: H01L2701
- IPC分类号: H01L2701
摘要:
Disclosed is a method for making a semiconductor integrated circuit device used to form a p-channel MOS field-effect transistor and a n-channel MOS field-effect transistor on a common SOI substrate with a structure that a first silicon layer, insulating film and a second silicon layer are layered; wherein the steps from sectioning a SOI layer as the second silicon layer by insulation separation into a plurality of active regions to forming at least one gate electrode to be laid through gate insulating film on the surface of each of the plurality of active regions are conducted with no relation to the conductivity type of MOS field-effect transistor.
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