- 专利标题: Carbon-enhanced fluoride ion cleaning
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申请号: US09251061申请日: 1999-02-18
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公开(公告)号: US06416589B1公开(公告)日: 2002-07-09
- 发明人: Don Mark Lipkin , Lyle Timothy Rasch , Peter Joel Meschter
- 申请人: Don Mark Lipkin , Lyle Timothy Rasch , Peter Joel Meschter
- 主分类号: B08B500
- IPC分类号: B08B500
摘要:
A method and system for cleaning a metal article. The system is used to employ a method that comprises placing the article in a means defining a chamber; subjecting the article to a gaseous atmosphere in the means defining a chamber, where the gaseous atmosphere consisting essentially of carbon, hydrogen, and fluorine; and subjecting the article to the gaseous atmosphere at a temperature in a range from about 815° C. to about 1100° C. to clean the article.
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