发明授权
- 专利标题： Turbo molecular pump
- 专利标题（中）： 涡轮分子泵
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申请号： US09882159申请日： 2001-06-15
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公开(公告)号： US06419461B2公开(公告)日： 2002-07-16
- 发明人: Takashi Okada
- 申请人： Takashi Okada
- 主分类号： F04B3906
- IPC分类号： F04B3906
摘要：
A turbo molecular pump comprises an electric component section having a motor, a base section supporting the electric component section, a shaft rotationally driven by the motor, and an impeller connected to the shaft for rotation therewith. A casing houses the electric component section, and a heat insulating material is disposed between the casing and the base section.
公开/授权文献
- US20010051100A1 Turbo molecular pump 公开/授权日：2001-12-13
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