发明授权
- 专利标题: Insert target assembly and method of making same
- 专利标题(中): 插入目标组件及其制作方法
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申请号: US09807261申请日: 2001-04-09
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公开(公告)号: US06419806B1公开(公告)日: 2002-07-16
- 发明人: Melvin K. Holcomb , William E. Barnes , Steven L. Bardus
- 申请人: Melvin K. Holcomb , William E. Barnes , Steven L. Bardus
- 主分类号: B23K2000
- IPC分类号: B23K2000
摘要:
Method of forming a two-piece hollow cathode sputter target assembly and the assembly formed thereby. The sputter target assembly includes an outer shell having a substantially cylindrical side wall and is composed of a relatively low purity metallic material. A sputtering insert includes a substantially cylindrical side wall and is concentrically received within, and bonded to, the outer shell. The sputtering insert is composed of a relatively high purity metallic material as used for depositing a thin layer or film onto a desired substrate.
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