发明授权
US06420750B1 Structure and method for buried-strap with reduced outdiffusion 失效
掩埋带的结构和方法减少了扩散

Structure and method for buried-strap with reduced outdiffusion
摘要:
A method and structure for forming an integrated circuit memory device includes forming a trench conductor in a trench, forming an isolation collar along a perimeter of an upper portion of the trench conductor, forming supporting spacers above the isolation collar, forming a sacrificial layer between the supporting spacers along an upper surface of the trench conductor, forming an insulator above the sacrificial layer, forming a gate conductor above the insulator, removing the sacrificial layer to form a gap between the insulator and the trench conductor, wherein the supporting spacers maintain a relative position of the gate conductor, the insulator and the trench conductor and forming a conductive strap in the gap.
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