发明授权
- 专利标题： Self-exciting and self-detecting probe and scanning probe apparatus
- 专利标题（中）： 自激和自检探头和扫描探头装置
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申请号： US09526148申请日： 2000-03-15
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公开(公告)号： US06422069B1公开(公告)日： 2002-07-23
- 发明人: Nobuhiro Shimizu , Yoshiharu Shirakawabe , Hiroshi Takahashi , Chiaki Yasumuro , Tadashi Arai
- 申请人： Nobuhiro Shimizu , Yoshiharu Shirakawabe , Hiroshi Takahashi , Chiaki Yasumuro , Tadashi Arai
- 优先权： JP11-070923 19990316; JP2000-019217 20000127
- 主分类号： G01B528
- IPC分类号： G01B528
摘要：
A scanning probe apparatus and a self-exciting cantilever probe therefor are provided for measuring a characteristic of a sample by scanning a lever of the probe across the sample surface. The probe has a deflectable lever extending from a base and formed integrally therewith, and a resistive body provided on the lever to excite the lever in response to a periodic bias signal applied to the resistive body. In addition, the resistive body has a resistance value that varies in response to deflection of the lever so that the resistance of the resistive body may be monitored to detect deflection of the lever.
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