发明授权
- 专利标题: Synthetic quartz glass preform
- 专利标题(中): 合成石英玻璃预制件
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申请号: US09381490申请日: 1999-09-10
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公开(公告)号: US06423656B1公开(公告)日: 2002-07-23
- 发明人: Frank Coriand , Andreas Menzel , Andreas Voitsch
- 申请人: Frank Coriand , Andreas Menzel , Andreas Voitsch
- 优先权: DE19709379 19970307
- 主分类号: C03C900
- IPC分类号: C03C900
摘要:
The invention relates to a synthetic quartz glass preform which is produced according to the flame hydrolysis technique with subsequent cooling and is suitable for the application of high-energy DUV radiation in the wave length range under 250 nm. Said preform has a core area which contains ≧1150 ppm OH, a strain double refraction of ≦5 nm/cm and a resistance to high-energy DUV radiation as a result of a transmission reduction of &Dgr; T ≦0.1 %/cm thickness. The quartz glass has been exposed to the following radiation: wavelength &lgr;1=248 nm, laser shot frequency ≧300 Hz, laser shot value ≧109 and rumination ≦10 mJ/cm2, and wavelength &lgr;2=193 nm, laser shot frequency ≧300 Hz, laser shot value ≧109 and rumination ≦5 mJ/cm2. A device for producing said preform comprises a horizontally positioned muffle with two different-sized openings facing each other. The larger of said openings is for removing the preform, the smaller opening being for introducing a burner. The internal chamber of the muffle narrows from the larger opening to the smaller opening.