Invention Grant
- Patent Title: X-ray image sensor and method for fabricating the same
- Patent Title (中): X射线图像传感器及其制造方法
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Application No.: US75024400Application Date: 2000-12-29
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Publication No.: US6423973B2Publication Date: 2002-07-23
- Inventor: CHOO KYO-SEOP , PARK JUNE-HO
- Applicant: LG PHILIPS LCD CO LTD
- Priority: KR19990067854 1999-12-31
- Main IPC: H04N5/32
- IPC: H04N5/32 ; G01T1/24 ; H01L21/331 ; H01L27/146

Abstract:
An X-ray image sensor fabricated using eight-mask steps. A thin film transistor (TFT) having a gate electrode, a first insulation layer, pure and doped amorphous silicon layers, and source and drain electrodes is on a substrate. An island-shaped first insulation layer, semiconductor layer, and ground line are also formed. A second insulation layer having a first drain contact hole and a ground line contact hole covers the TFT, the substrate, and the ground line. An auxiliary drain electrode on the second insulation layer contacts the drain electrode through the first drain contact hole. A capacitor electrode on the second insulation layer contacts the ground line through the ground line contact hole. A third insulation layer having a second drain contact hole that exposes the auxiliary drain is on the second insulation layer, the auxiliary drain electrode, and the capacitor electrode. A pixel electrode on the third insulation layer contacts the auxiliary drain electrode through the second drain contact hole.
Information query