发明授权
US06424038B1 Low dielectric constant microelectronic conductor structure with enhanced adhesion and attenuated electrical leakage 有权
低介电常数微电子导体结构具有增强的附着力和减弱的漏电

  • 专利标题: Low dielectric constant microelectronic conductor structure with enhanced adhesion and attenuated electrical leakage
  • 专利标题(中): 低介电常数微电子导体结构具有增强的附着力和减弱的漏电
  • 申请号: US09812029
    申请日: 2001-03-19
  • 公开(公告)号: US06424038B1
    公开(公告)日: 2002-07-23
  • 发明人: Tien-I BaoSyun-Ming Jang
  • 申请人: Tien-I BaoSyun-Ming Jang
  • 主分类号: H01L2348
  • IPC分类号: H01L2348
Low dielectric constant microelectronic conductor structure with enhanced adhesion and attenuated electrical leakage
摘要:
Within both a microelectronic conductor structure and a method for forming the microelectronic conductor structure there is employed a silicon carbide layer having formed thereupon a silicon nitride layer in turn having formed thereupon a patterned low dielectric constant dielectric layer in turn having formed interposed between its patterns a patterned conductor layer. Within both the microelectronic conductor structure and the method for forming the microelectronic conductor structure, by employing the silicon carbide layer having formed thereupon the silicon nitride layer in turn having formed thereupon the patterned low dielectric constant dielectric layer, the microelectronic conductor structure is formed with enhanced adhesion and attenuated electrical leakage.
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