发明授权
US06428586B1 Method of manufacturing a polymer or polymer/composite polishing pad
有权
制造聚合物或聚合物/复合抛光垫的方法
- 专利标题: Method of manufacturing a polymer or polymer/composite polishing pad
- 专利标题(中): 制造聚合物或聚合物/复合抛光垫的方法
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申请号: US09734089申请日: 2000-12-11
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公开(公告)号: US06428586B1公开(公告)日: 2002-08-06
- 发明人: Paul J. Yancey
- 申请人: Paul J. Yancey
- 主分类号: B32
- IPC分类号: B32
摘要:
Manufacture of a polishing pad for polishing a semiconductor substrate, involves, transporting a backing layer to successive manufacturing stations, supplying a fluid phase polymer composition onto the transported backing layer, shaping the fluid phase polymer composition into a surface layer having a measured thickness, and curing the polymer composition on the transported backing layer in a curing oven to convert the liquid phase polymer composition to a solid phase polishing layer attached to the transported backing layer.
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