发明授权
- 专利标题: Aluminum nitride sintered body and method of preparing the same
- 专利标题(中): 氮化铝烧结体及其制备方法
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申请号: US09783259申请日: 2001-02-13
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公开(公告)号: US06428741B2公开(公告)日: 2002-08-06
- 发明人: Yasuhisa Yushio , Hirohiko Nakata , Kazutaka Sasaki , Masuhiro Natsuhara , Motoyuki Tanaka , Yasuhiro Murase
- 申请人: Yasuhisa Yushio , Hirohiko Nakata , Kazutaka Sasaki , Masuhiro Natsuhara , Motoyuki Tanaka , Yasuhiro Murase
- 优先权: JP10-206353 19980722
- 主分类号: C04B35581
- IPC分类号: C04B35581
摘要:
Provided is an aluminum nitride sintered body excellent in thermal shock resistance and strength and applicable to a radiating substrate for a power module or a jig for semiconductor equipment employed under a strict heat cycle. An aluminum nitride sintered body obtained with a sintering aid of a rare earth element and an alkaline earth metal element contains 0.01 to 5 percent by weight of an alkaline earth metal element compound in terms of an oxide and 0.01 to 10 percent by weight of a rare earth element compound in terms of an oxide, and the amount of carbon remaining in the sintered body is controlled to 0.005 to 0.1 percent by weight, thereby suppressing grain growth and improving thermal shock resistance and strength of the sintered body.