发明授权
US06434327B1 Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
失效
快速热加热装置和方法，包括用于测量基板温度的红外相机
- 专利标题： Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
- 专利标题（中）： 快速热加热装置和方法，包括用于测量基板温度的红外相机
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申请号： US08508638申请日： 1995-07-28
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公开(公告)号： US06434327B1公开(公告)日： 2002-08-13
- 发明人: Christian M. Gronet , James F. Gibbons
- 申请人： Christian M. Gronet , James F. Gibbons
- 主分类号： A21B200
- IPC分类号： A21B200
摘要：
A rapid thermal heating apparatus including a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources and reflectors direct radiation through a window of an envacuable chamber to radiate regions of a substrate in the chamber with a pattern of radiation intensity.