发明授权
US06439972B2 Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method
有权
抛光液,抛光法,半导体器件及半导体器件的制造方法
- 专利标题: Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method
- 专利标题(中): 抛光液,抛光法,半导体器件及半导体器件的制造方法
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申请号: US09894117申请日: 2001-06-28
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公开(公告)号: US06439972B2公开(公告)日: 2002-08-27
- 发明人: Sudhanshu Misra , Pradip Kumar Roy , Sundar Srinivasaan Chetlur , Vivek Saxena
- 申请人: Sudhanshu Misra , Pradip Kumar Roy , Sundar Srinivasaan Chetlur , Vivek Saxena
- 主分类号: B24B2118
- IPC分类号: B24B2118
摘要:
A polishing fluid comprising a distributed organic phase and a continuous aqueous phase, each phase comprising at least one complexing agent. The aqueous phase also having abrasive particles dispersed therein. Reaction products generated during polishing interact with the aqueous phase complexing agent to form water soluble metallic complexes, the water soluble metallic complexes diffuse to an organic/water interface where they release complexing agent molecules in the aqueous phase and generate metal ions which interact with the organic phase complexing agent to form organometallic complexes. Further disclosed is a polishing method, a semiconductor device and semiconductor device fabrication method utilizing the polishing fluid.
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