- 专利标题: Semiconductor device and method of fabricating the same
-
申请号: US09576971申请日: 2000-05-24
-
公开(公告)号: US06441420B1公开(公告)日: 2002-08-27
- 发明人: Yoshihisa Nagano , Yasuhiro Uemoto
- 申请人: Yoshihisa Nagano , Yasuhiro Uemoto
- 优先权: JP11-146103 19990526
- 主分类号: H01L2994
- IPC分类号: H01L2994
摘要:
A protective insulating film is deposited over first and second field-effect transistors formed on a semiconductor substrate. A capacitor composed of a capacitor lower electrode, a capacitor insulating film composed of an insulating metal oxide film, and a capacitor upper electrode is formed on the protective insulating film. A first contact plug formed in the protective insulating film provides a direct connection between the capacitor lower electrode and an impurity diffusion layer of the first field-effect transistor. A second contact plug formed in the protective insulating film provides a direct connection between the capacitor upper electrode and an impurity diffusion layer of the second field-effect transistor.
信息查询