发明授权
US06441537B1 Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
失效
具有至少一个压电/电致伸缩膜的压电/电致伸缩致动器
- 专利标题： Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
- 专利标题（中）： 具有至少一个压电/电致伸缩膜的压电/电致伸缩致动器
-
申请号： US08384469申请日： 1995-02-02
-
公开(公告)号： US06441537B1公开(公告)日： 2002-08-27
- 发明人: Yukihisa Takeuchi , Koji Kimura , Masato Komazawa
- 申请人： Yukihisa Takeuchi , Koji Kimura , Masato Komazawa
- 优先权： JP1-178747 19890711; JP2-11174 19900120
- 主分类号： H01L4108
- IPC分类号： H01L4108
摘要：
A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.