发明授权
- 专利标题: Method and apparatus for precision three-dimensional opto-mechanical assembly
- 专利标题(中): 精密三维光机械装配方法与装置
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申请号: US09789020申请日: 2001-02-20
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公开(公告)号: US06441895B1公开(公告)日: 2002-08-27
- 发明人: Yakov Kogan , Daryoosh Vakhshoori
- 申请人: Yakov Kogan , Daryoosh Vakhshoori
- 主分类号: G01B900
- IPC分类号: G01B900
摘要:
A method for achieving three-dimensional alignment of a pair of optical components, and apparatus for supporting such method, is initiated by fixing one of the optical components at a selected location on a semiconductor substrate. Subsequently, the other optical component and its associated submount are attached to a pair of coupled motion stages. A reference signal, to which the first optical component has been aligned, is transmitted to the other component and to a detector. That detector is positioned to measure changes in a selected characteristic of the reference signal, such as changes in optical power, as the position of the second optical component and its submount are manipulated. Through the use of a feedback loop, the second component and submount are moved in a pattern until an optimal alignment is converged upon.